Ultrafast laser parallel microprocessing using high uniformity binary Dammann grating generated beam array
Identifieur interne : 000262 ( Main/Repository ); précédent : 000261; suivant : 000263Ultrafast laser parallel microprocessing using high uniformity binary Dammann grating generated beam array
Auteurs : RBID : Pascal:13-0174569Descripteurs français
- Pascal (Inist)
English descriptors
- KwdEn :
Abstract
Ultrafast laser parallel processing using diffractive multi-beam patterns generated by a spatial light modulator (SLM) has demonstrated a great increase in processing throughput and efficiency. Applications ranging from surface thin film patterning to internal 3D refractive index modification have been recently reported with the parallel processing technology. Periodic and symmetrical geometry design (e.g. N x M beam array) of the multi-beam pattern must be avoided to guarantee the required high uniformity in these applications, which, however, limited the processing flexibility. In this paper, Dammann gratings are used to create diffractive 1 × 5 and 5 × 5 beam arrays for the parallel processing. The 0-th order, observed slightly stronger than the other higher orders, can be adjusted by superimposing a Fresnel zone lens (FZL) and tuning the degree of defocusing at the processing plane. The uniformity (presented by the variation of the machined hole diameter) is measured to be <4% after the adjustment. Additionally, a parallel surface patterning of indium tin oxide (ITO) thin film with periodic array structures was demonstrated using the Dammann grating generated beam array without requiring the complicated geometry separation and the time-consuming positioning.
Links toward previous steps (curation, corpus...)
- to stream Main, to step Corpus: 000E39
Links to Exploration step
Pascal:13-0174569Le document en format XML
<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en" level="a">Ultrafast laser parallel microprocessing using high uniformity binary Dammann grating generated beam array</title><author><name>ZHENG KUANG</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laser Group, Centre for Material and Structures, School of Engineering, University of Liverpool, Brownlow Street</s1><s2>Liverpool L69 3GQ</s2><s3>GBR</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ><sZ>7 aut.</sZ><sZ>8 aut.</sZ></inist:fA14><country>Royaume-Uni</country><wicri:noRegion>Liverpool L69 3GQ</wicri:noRegion></affiliation></author><author><name sortKey="Perrie, Walter" uniqKey="Perrie W">Walter Perrie</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laser Group, Centre for Material and Structures, School of Engineering, University of Liverpool, Brownlow Street</s1><s2>Liverpool L69 3GQ</s2><s3>GBR</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ><sZ>7 aut.</sZ><sZ>8 aut.</sZ></inist:fA14><country>Royaume-Uni</country><wicri:noRegion>Liverpool L69 3GQ</wicri:noRegion></affiliation></author><author><name>DUN LIU</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laser Group, Centre for Material and Structures, School of Engineering, University of Liverpool, Brownlow Street</s1><s2>Liverpool L69 3GQ</s2><s3>GBR</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ><sZ>7 aut.</sZ><sZ>8 aut.</sZ></inist:fA14><country>Royaume-Uni</country><wicri:noRegion>Liverpool L69 3GQ</wicri:noRegion></affiliation></author><author><name sortKey="Edwardson, Stuart P" uniqKey="Edwardson S">Stuart P. Edwardson</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laser Group, Centre for Material and Structures, School of Engineering, University of Liverpool, Brownlow Street</s1><s2>Liverpool L69 3GQ</s2><s3>GBR</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ><sZ>7 aut.</sZ><sZ>8 aut.</sZ></inist:fA14><country>Royaume-Uni</country><wicri:noRegion>Liverpool L69 3GQ</wicri:noRegion></affiliation></author><author><name>YAO JIANG</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laser Group, Centre for Material and Structures, School of Engineering, University of Liverpool, Brownlow Street</s1><s2>Liverpool L69 3GQ</s2><s3>GBR</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ><sZ>7 aut.</sZ><sZ>8 aut.</sZ></inist:fA14><country>Royaume-Uni</country><wicri:noRegion>Liverpool L69 3GQ</wicri:noRegion></affiliation></author><author><name sortKey="Fearon, Eamonn" uniqKey="Fearon E">Eamonn Fearon</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laser Group, Centre for Material and Structures, School of Engineering, University of Liverpool, Brownlow Street</s1><s2>Liverpool L69 3GQ</s2><s3>GBR</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ><sZ>7 aut.</sZ><sZ>8 aut.</sZ></inist:fA14><country>Royaume-Uni</country><wicri:noRegion>Liverpool L69 3GQ</wicri:noRegion></affiliation></author><author><name sortKey="Watkins, Ken G" uniqKey="Watkins K">Ken G. Watkins</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laser Group, Centre for Material and Structures, School of Engineering, University of Liverpool, Brownlow Street</s1><s2>Liverpool L69 3GQ</s2><s3>GBR</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ><sZ>7 aut.</sZ><sZ>8 aut.</sZ></inist:fA14><country>Royaume-Uni</country><wicri:noRegion>Liverpool L69 3GQ</wicri:noRegion></affiliation></author><author><name sortKey="Dearden, Geoff" uniqKey="Dearden G">Geoff Dearden</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laser Group, Centre for Material and Structures, School of Engineering, University of Liverpool, Brownlow Street</s1><s2>Liverpool L69 3GQ</s2><s3>GBR</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ><sZ>7 aut.</sZ><sZ>8 aut.</sZ></inist:fA14><country>Royaume-Uni</country><wicri:noRegion>Liverpool L69 3GQ</wicri:noRegion></affiliation></author></titleStmt><publicationStmt><idno type="inist">13-0174569</idno><date when="2013">2013</date><idno type="stanalyst">PASCAL 13-0174569 INIST</idno><idno type="RBID">Pascal:13-0174569</idno><idno type="wicri:Area/Main/Corpus">000E39</idno><idno type="wicri:Area/Main/Repository">000262</idno></publicationStmt><seriesStmt><idno type="ISSN">0169-4332</idno><title level="j" type="abbreviated">Appl. surf. sci.</title><title level="j" type="main">Applied surface science</title></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Arrays</term><term>Optical fiber networks</term></keywords><keywords scheme="Pascal" xml:lang="fr"><term>Réseau fibre optique</term><term>Réseau(arrangement)</term></keywords></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Ultrafast laser parallel processing using diffractive multi-beam patterns generated by a spatial light modulator (SLM) has demonstrated a great increase in processing throughput and efficiency. Applications ranging from surface thin film patterning to internal 3D refractive index modification have been recently reported with the parallel processing technology. Periodic and symmetrical geometry design (e.g. N x M beam array) of the multi-beam pattern must be avoided to guarantee the required high uniformity in these applications, which, however, limited the processing flexibility. In this paper, Dammann gratings are used to create diffractive 1 × 5 and 5 × 5 beam arrays for the parallel processing. The 0-th order, observed slightly stronger than the other higher orders, can be adjusted by superimposing a Fresnel zone lens (FZL) and tuning the degree of defocusing at the processing plane. The uniformity (presented by the variation of the machined hole diameter) is measured to be <4% after the adjustment. Additionally, a parallel surface patterning of indium tin oxide (ITO) thin film with periodic array structures was demonstrated using the Dammann grating generated beam array without requiring the complicated geometry separation and the time-consuming positioning.</div></front></TEI><inist><standard h6="B"><pA><fA01 i1="01" i2="1"><s0>0169-4332</s0></fA01><fA03 i2="1"><s0>Appl. surf. sci.</s0></fA03><fA05><s2>273</s2></fA05><fA08 i1="01" i2="1" l="ENG"><s1>Ultrafast laser parallel microprocessing using high uniformity binary Dammann grating generated beam array</s1></fA08><fA11 i1="01" i2="1"><s1>ZHENG KUANG</s1></fA11><fA11 i1="02" i2="1"><s1>PERRIE (Walter)</s1></fA11><fA11 i1="03" i2="1"><s1>DUN LIU</s1></fA11><fA11 i1="04" i2="1"><s1>EDWARDSON (Stuart P.)</s1></fA11><fA11 i1="05" i2="1"><s1>YAO JIANG</s1></fA11><fA11 i1="06" i2="1"><s1>FEARON (Eamonn)</s1></fA11><fA11 i1="07" i2="1"><s1>WATKINS (Ken G.)</s1></fA11><fA11 i1="08" i2="1"><s1>DEARDEN (Geoff)</s1></fA11><fA14 i1="01"><s1>Laser Group, Centre for Material and Structures, School of Engineering, University of Liverpool, Brownlow Street</s1><s2>Liverpool L69 3GQ</s2><s3>GBR</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ><sZ>7 aut.</sZ><sZ>8 aut.</sZ></fA14><fA20><s1>101-106</s1></fA20><fA21><s1>2013</s1></fA21><fA23 i1="01"><s0>ENG</s0></fA23><fA43 i1="01"><s1>INIST</s1><s2>16002</s2><s5>354000504110090150</s5></fA43><fA44><s0>0000</s0><s1>© 2013 INIST-CNRS. All rights reserved.</s1></fA44><fA45><s0>14 ref.</s0></fA45><fA47 i1="01" i2="1"><s0>13-0174569</s0></fA47><fA60><s1>P</s1></fA60><fA61><s0>A</s0></fA61><fA64 i1="01" i2="1"><s0>Applied surface science</s0></fA64><fA66 i1="01"><s0>NLD</s0></fA66><fC01 i1="01" l="ENG"><s0>Ultrafast laser parallel processing using diffractive multi-beam patterns generated by a spatial light modulator (SLM) has demonstrated a great increase in processing throughput and efficiency. Applications ranging from surface thin film patterning to internal 3D refractive index modification have been recently reported with the parallel processing technology. Periodic and symmetrical geometry design (e.g. N x M beam array) of the multi-beam pattern must be avoided to guarantee the required high uniformity in these applications, which, however, limited the processing flexibility. In this paper, Dammann gratings are used to create diffractive 1 × 5 and 5 × 5 beam arrays for the parallel processing. The 0-th order, observed slightly stronger than the other higher orders, can be adjusted by superimposing a Fresnel zone lens (FZL) and tuning the degree of defocusing at the processing plane. The uniformity (presented by the variation of the machined hole diameter) is measured to be <4% after the adjustment. Additionally, a parallel surface patterning of indium tin oxide (ITO) thin film with periodic array structures was demonstrated using the Dammann grating generated beam array without requiring the complicated geometry separation and the time-consuming positioning.</s0></fC01><fC02 i1="01" i2="3"><s0>001B60</s0></fC02><fC02 i1="02" i2="3"><s0>001B70</s0></fC02><fC02 i1="03" i2="3"><s0>001B80</s0></fC02><fC03 i1="01" i2="3" l="FRE"><s0>Réseau fibre optique</s0><s5>01</s5></fC03><fC03 i1="01" i2="3" l="ENG"><s0>Optical fiber networks</s0><s5>01</s5></fC03><fC03 i1="02" i2="3" l="FRE"><s0>Réseau(arrangement)</s0><s5>02</s5></fC03><fC03 i1="02" i2="3" l="ENG"><s0>Arrays</s0><s5>02</s5></fC03><fN21><s1>154</s1></fN21><fN44 i1="01"><s1>OTO</s1></fN44><fN82><s1>OTO</s1></fN82></pA></standard></inist></record>Pour manipuler ce document sous Unix (Dilib)
EXPLOR_STEP=IndiumV3/Data/Main/Repository
HfdSelect -h $EXPLOR_STEP/biblio.hfd -nk 000262 | SxmlIndent | more
Ou
HfdSelect -h $EXPLOR_AREA/Data/Main/Repository/biblio.hfd -nk 000262 | SxmlIndent | more
Pour mettre un lien sur cette page dans le réseau Wicri
{{Explor lien
|wiki= *** parameter Area/wikiCode missing ***
|area= IndiumV3
|flux= Main
|étape= Repository
|type= RBID
|clé= Pascal:13-0174569
|texte= Ultrafast laser parallel microprocessing using high uniformity binary Dammann grating generated beam array
}}
| This area was generated with Dilib version V0.5.77. |  |